15.01.2023
使用Eulitha技术制造的令人印象深刻的高纵横比硅微柱
Impressive high aspect ratio Si micropillars made by our colleagues at the Paul Scherrer Institut PSI using EULITHA AG’s PhableR™ UV Lithography system and MacEtch process.
Here is the full report: https://lnkd.in/er9VS3gd
